Equipment Rates

Usage rates are displayed below. For staff assistance, add $50/hr for internal rates, or $55/hr for external rates. Rates are per hour unless otherwise noted. Download Rates to CSV file

Rate Classes

  • Internal - University of Florida accounts
  • Ext. Acad/Gov - Non-UF Academic or Government
  • Ext. Intl. Acad - Non-UF International Academic
  • Ext. Affiliated - Affiliated Commercial/Industrial (25% discount for member companies)
  • External - Commercial/Industrial

FY2023 Rate Listing

Show: All Characterization Fabrication

Name Type Internal Ext. Acad / Gov Ext. Intl. Acad Ext. Affiliated External Notes
4 Point Probe Station Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
ALD - Cambridge Nano Fiji 200 Fabrication $93.00 $139.50 $186.00 $139.50 $186.00 Rates are per run. (Max run 24 hrs)
Allied Multi-prep Lapping and Polishing system Characterization $0.00 $0.00 $0.00 $0.00 $0.00 Users must purchase their own consumables for this equipment.
Amerimade Bench BOE/HF Fabrication $25.00 $37.50 $50.00 $37.50 $50.00 $35 charge for bath refills
Amerimade Bench SC1/SC2 Fabrication $25.00 $37.50 $50.00 $37.50 $50.00 $35 surcharge per use
Asher - Anatech Barrel SCE600 Fabrication $45.00 $67.50 $90.00 $67.50 $90.00
Asher - Tepla M4L Fabrication $45.00 $67.50 $90.00 $67.50 $90.00
Autosorb iQ - Analysis (Ar, CO2, He) Characterization $2.00 $3.00 $4.00 $12.00 $16.00
Autosorb iQ - Krypton Characterization $0.00 $0.00 $0.00 $0.00 $0.00
Autosorb iQ - Outgassing (monitor) Characterization $0.00 $0.00 $0.00 $0.00 $0.00
Bruker Optical Profilometer Characterization $25.00 $37.50 $50.00 $39.00 $52.00
Cameca SX Five FE EPMA Characterization $52.00 $78.00 $104.00 $157.50 $210.00
Coater - Carbon Characterization $15.50 $23.25 $31.00 $31.50 $42.00 Staff run only
Coater - Hummer V Au-Pd Characterization $15.50 $23.25 $31.00 $31.50 $42.00 Staff run only
Coater - SPI Au-Pd Characterization $15.50 $23.25 $31.00 $31.50 $42.00 Staff run only
Coulter LS13320 Characterization $36.00 $54.00 $72.00 $132.00 $176.00
Critical Point Dryer Fabrication $62.00 $93.00 $124.00 $93.00 $124.00 Rates are per run. $20 surcharge per use
Dicing Saws- ADT Fabrication $41.50 $62.25 $83.00 $62.25 $83.00
DRIE - Deep RIE, STS Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
DRIE - Oxford Plasma Pro Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
E-beam evaporator, PVD Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
Electronic Measurement, Lakeshore 7507 Fabrication $21.00 $31.50 $42.00 $31.50 $42.00
Ellipsometer, J.A. Woolam Characterization $21.00 $31.50 $42.00 $31.50 $42.00
FIB - FEI Helios G4 PFIB CXe dual beam FIB/SEM Characterization $51.50 $77.25 $103.00 $193.50 $258.00
FIB - FEI Helios NanoLab 600 dual beam FIB/SEM Characterization $67.00 $100.50 $134.00 $193.50 $258.00
Flexus 2320 Fabrication $21.00 $31.50 $42.00 $31.50 $42.00
FTIR/FTIR Microscope - ThermoFisher iS50 Characterization $52.00 $78.00 $104.00 $154.50 $206.00
Furnace Tube, Thermcraft, General Hot Process Fabrication $21.00 $31.50 $42.00 $31.50 $42.00
Furnace Tube, Tystar #1 Wet and dry Ox Fabrication $25.00 $37.50 $50.00 $37.50 $50.00 Staff run only
General Acids/Bases Bench-Left Fabrication $25.00 $37.50 $50.00 $37.50 $50.00
Heidelberg Laser Writer Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
Horiba microRaman Characterization $45.50 $68.25 $91.00 $154.50 $206.00
JCPDS Computer Characterization $8.00 $12.00 $16.00 $39.00 $52.00
JST Wet Bench Fabrication $25.00 $37.50 $50.00 $37.50 $50.00
K&S 4124 Ball Bonder, Gold Ball Fabrication $29.00 $43.50 $58.00 $43.50 $58.00
K&S 4700 Wedge Bonder (Staff Run) Fabrication $29.00 $43.50 $58.00 $43.50 $58.00
Labconco Triad Freeze Dryer Characterization $31.00 $46.50 $62.00 $46.50 $62.00 Rates are per day
Litho Process BSC-100 Spinner Fabrication $33.00 $49.50 $66.00 $49.50 $66.00
Litho Process EVG Model 620 w/BSA Fabrication $45.50 $68.25 $91.00 $68.25 $91.00
Litho Process Headway E-Beam Bay & Hot Plate/Oven Fabrication $33.00 $49.50 $66.00 $49.50 $66.00
Litho Process Karl Suss MA6 Fabrication $45.50 $68.25 $91.00 $68.25 $91.00
Litho Process Laurell Litho Bay & Hot Plate/Oven Fabrication $33.00 $49.50 $66.00 $49.50 $66.00
Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven Fabrication $33.00 $49.50 $66.00 $49.50 $66.00
Litho Process Suss Delta 20 & Hot Plate Fabrication $45.50 $68.25 $91.00 $68.25 $91.00
Litho Process Suss Delta 80 & Hot Plate/Oven Fabrication $45.50 $68.25 $91.00 $68.25 $91.00
Malvern Zetasizer Ultra Characterization $36.00 $54.00 $72.00 $132.00 $176.00
Nano-CT - GE v|tome|x m 240 Characterization $36.00 $54.00 $72.00 $232.50 $310.00 Rates are for first 3 hours. Additional hours for
each rate class are: $10/hr, $15/hr, $20/hr, $30/hr, and $40/hr
Nano-CT Image Processing/Reconstruction System Characterization $8.00 $12.00 $16.00 $39.00 $52.00
Nikon LV100 Microscope Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
NRF Cleanroom Fabrication $18.00 $23.00 $23.00 $23.00 $23.00 Rates are per day
Objet 3D Printer Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Service work only
Oven, YES, Image Reversal/HMDS Fabrication $16.50 $24.75 $33.00 $24.75 $33.00
Paar Physica Electro Kinetic Analyzer Characterization $26.00 $39.00 $52.00 $132.00 $176.00
Panalytical XPert MRD Characterization $26.00 $39.00 $52.00 $157.50 $210.00
Panalytical XPert Powder Characterization $26.00 $39.00 $52.00 $154.50 $206.00
PDMS Process Tools - Room 235 Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
PDMS-Spinner Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
PECVD - STS 310PC SiO2 - SiN - Amorphous Si Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
PECVD - Unaxis 790 PECVD Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
Perkin-Elmer PHI 660 - AES Characterization $36.00 $54.00 $72.00 $154.50 $206.00
Photospectrometer, Filmetrics F40 Fabrication $21.00 $31.50 $42.00 $31.50 $42.00
Profilometer, Dektak 150 Fabrication $45.50 $68.25 $91.00 $68.25 $91.00
Profilometer, Tencor AS500 Characterization $21.00 $31.50 $42.00 $31.50 $42.00
Quantachrome PoreMaster Mercury Porosimeter Characterization $51.50 $77.25 $103.00 $132.00 $176.00
Quantachrome Porometer 3g zh Characterization $36.00 $54.00 $72.00 $54.00 $72.00
Quantachrome Ultrapyc 1000 Gas Pycnometer Characterization $36.00 $54.00 $72.00 $54.00 $72.00
Raith 150, e-beam lithography Fabrication $31.00 $46.50 $62.00 $46.50 $62.00 Staff run only
Rheometer - ARES LS1 Characterization $10.50 $15.75 $21.00 $46.50 $62.00
RIE - Unaxis 790 RIE Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
RIE/ICP - Trion Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
RIE/ICP - Unaxis SLR Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
RTA, SSI Solaris 150 Fabrication $45.50 $68.25 $91.00 $68.25 $91.00
RTA, Steag 100CS RTP Fabrication $45.50 $68.25 $91.00 $68.25 $91.00
SCS Parylene Coater Fabrication $26.00 $39.00 $52.00 $37.50 $52.00 Rates are per run
SEM - FEI Nova 430 w/EDS & CL Characterization $62.00 $93.00 $124.00 $157.50 $210.00
SEM - Hitachi S-3000 Characterization $36.00 $54.00 $72.00 $116.25 $155.00
SEM - JEOL 5700 Fabrication $45.50 $68.25 $91.00 $68.25 $91.00
SEM - Tescan MIRA3 Characterization $62.00 $93.00 $124.00 $157.50 $210.00
Solvent Bench #1 Lift Off Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Solvent Bench #1 PR Strip Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Solvent Bench 2 - hot plate and workspace Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Spin Dryer - Sitek Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
SPM/AFM Dimension 3100 Characterization $41.50 $62.25 $83.00 $116.25 $155.00
Sputter Deposition, AJA - STAFF ONLY Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
Sputter Deposition, KJL CMS-18 Multi-Source Fabrication $49.50 $74.25 $99.00 $74.25 $99.00
TEM - FEI Talos F200i S/TEM Characterization $52.00 $108.00 $144.00 $187.50 $250.00
TEM - FEI Tecnai F20 S/TEM Characterization $72.00 $108.00 $144.00 $187.50 $250.00
TEM - FEI Themis Z S/TEM Characterization $52.00 $120.00 $144.00 $225.00 $300.00
TSI PSD 3603 (Aerosizer) Characterization $36.00 $54.00 $72.00 $132.00 $176.00
UV/Vis - Perkin-Elmer Lambda 800 Characterization $36.00 $54.00 $72.00 $132.00 $176.00
Versa software workstation Characterization $8.00 $12.00 $16.00 $39.00 $52.00
Wafer Bonder, EVG 501 Fabrication $33.00 $49.50 $66.00 $49.50 $66.00
Xnovo software workstation Characterization $0.00 $0.00 $0.00 $0.00 $0.00
XPS - ULVAC-PHI XPS Characterization $62.00 $93.00 $124.00 $193.50 $258.00
Zeiss Microscope Characterization $0.00 $0.00 $0.00 $0.00 $0.00
ZEISS Versa 620 XRM Characterization $36.00 $54.00 $72.00 $232.50 $310.00
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