PECVD - STS 310PC SiO2 - SiN - Amorphous Si - Status: Available
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STS 310PC - Plasma Enhanced Chemical Vapor Deposition System.
PECVD wiki link Microfabrication wiki link Latest Status Log EntryApr 12, 2024 - Resource Status Up - new pump installed..dep rates are good |
Training Topic | Description | Rates | Approx Session Length (hrs) |
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PECVD-STS Training | Standard Rate: $21.00/Complete User Training | 1 |
Start | End | Availability | Location | |
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Wed, May. 8, 2024 1:30 PM | Wed, May. 8, 2024 2:30 PM | 1 Seats out of 1 | NRF | Sign Up |
Thu, May. 23, 2024 9:00 AM | Thu, May. 23, 2024 10:00 AM | 1 Seats out of 1 | NRF | Sign Up |
Wed, Jun. 5, 2024 1:30 PM | Wed, Jun. 5, 2024 2:30 PM | 1 Seats out of 1 | NRF | Sign Up |
Thu, Jun. 20, 2024 9:00 AM | Thu, Jun. 20, 2024 10:00 AM | 1 Seats out of 1 | NRF | Sign Up |
Wed, Jul. 3, 2024 1:30 PM | Wed, Jul. 3, 2024 2:30 PM | 1 Seats out of 1 | NRF | Sign Up |
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